Advanced micro-precision coating machine: semiconductor packaging / high-speed solder paste injection / ultra-fine dots < 100 um
SL series is specifically designed for semiconductor micro fluid packaging applications for narrow gap filling, fine line dispensing and micro underfill with small machine footprint and aggressive price. SL has outstanding performance of motion route repeatability and accuracy, capable to precisely fill silver epoxy into 170um narrow gap as well as precisely dispense 0.2 nl material in total volume along the dispensing route whatever it is line, square, circle or any other shapes. SL series is designed to be able to accept up to 12' wafer for extreme precision dispensing and repeated dispensing path accuracy regardless dot, line or curve shape.
Precise hardware specifications
SL series has a special machine base and gantry designed by SSI research team with software simulation
to meet the highest repeatability accuracy of ±1um and position accuracy of ±2um for the goal of lower budget and highest performance.
VERSATILE DISPENSING APPLICATORS FOR ALL PRECISION APPLICATIONS
Piezo jet valve for high speed jetting
Progressive Cavity Pump(PCP) for precision high viscosity contact dispensing
Deposition pump for < 100 um dispensing
Solder paste jetting valve
Thin film ultrasonic spray coater
10:1 high precision mixing and dispensing
High precision air spray coater
ADVANCED DISPENSING VISION SOFTWARE WITH MOTION CONTROL
SSI vision software is the most advanced dispensing software integrating motion control and vision alignment with the following features :
Support SECS / GEM and mapping requirements
Close loop flow volume control
Automatically checking the dispensing volume on micro scale, monitoring, auto adjusting
and evenly distribute the dispensing volume alone the dispensing route
Quick process parameters setting
Just set up single chip dispensing parameters then the software can duplicate the same
parameters on all chips on the wafer
Effective dispensing delay time control
Underfill takes time to diffuse, with only few chip delay time parameters, V2K can
automatically calculate the proper dispensing delay time for all chip on the wafer
Stream motion
A dot to dot control technology, which synchronize dispensing frequency and the motion
speed enabling the uniform dispensing result regardless acceleration, deceleration or turning
Real time dispensing height measurement and compensation
Fiducial on fly
Integrated vision capabilities for auto alignment and optical inspection for 2D and 3D
Remote teaching
Engineers can remotely teach the robot without sitting in front of the machine